Parts For Sale TEGAL 37-485-009-3 TEGAL 37-485-009-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-485-009-3 Manufacturer TEGAL Part Number 37-485-009-3 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 51-259-003 39-756-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 46-1000-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-167-001 39-797-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 58-046-001