Parts For Sale TEGAL 37-471-001A TEGAL 37-471-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-471-001A Manufacturer TEGAL Part Number 37-471-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 52-050-001 46-1000-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 39-741-009 Tegal 903e lower electrode 52-167-001 39-797-001 58-046-001 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.