Parts For Sale TEGAL 37-411-001 TEGAL 37-411-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-411-001 Manufacturer TEGAL Part Number 37-411-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 80-650-053 ACTUATOR 39-636-001 80-195-450 51-056-001 42-826-005 39-380-001 51-178-001 40-790-001 FOCUS RING 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 150 mm 150 mm 25 slot Aluminum wafer carrier.
