Parts For Sale TEGAL 37-383-004 TEGAL 37-383-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-383-004 Manufacturer TEGAL Part Number 37-383-004 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-259-003 38-023-001 COOLING RING 40-481-002 Insulator Ring 39-741-026 Tegal 903e lower electrode 52-050-001 46-1000-001 52-167-001 58-046-001 39-735-004 Tegal 903e lower electrode 37-471-001A 150 mm 150 mm 25 slot Aluminum wafer carrier.