Parts For Sale TEGAL 37-314-001A TEGAL 37-314-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-314-001A Manufacturer TEGAL Part Number 37-314-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 46-180-001 93-229-005 RF CABLE 901E 51-191-001 46-786-001 46-787-002 39-761-001 40-295-003 FOCUS RING 80-871-146 CABLE MTCH NTWK INSTALLATION POSSIBLE ON: TEGAL 903 OPM: ... 39-665-001 55-008-001 BELT SPAT 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.