Parts For Sale TEGAL 37-260-001A TEGAL 37-260-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-260-001A Manufacturer TEGAL Part Number 37-260-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 161-0040K VALVE, INLINE VACUUM 51-251-001 51-092-001 56-006-001 46-787-003 51-259-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 52-175-001 150 mm 150 mm 25 slot Aluminum wafer carrier.