Parts For Sale TEGAL 37-251-001A TEGAL 37-251-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-251-001A Manufacturer TEGAL Part Number 37-251-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 31-406-003 WAFER SENSOR ASSY-VCE 51-259-003 80-650-053 ACTUATOR 39-756-003 52-050-001 46-1000-001 39-741-009 Tegal 903e lower electrode 52-167-001 58-046-001 37-471-001A