Parts For Sale TEGAL 37-240-003 TEGAL 37-240-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-240-003 Manufacturer TEGAL Part Number 37-240-003 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-481-002 Insulator Ring 42-1033-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 49-060-001 39-761-001 46-630-001 39-611-001 40-790-001 FOCUS RING 51-265-001 42-560-002