Parts For Sale TEGAL 37-202-003 TEGAL 37-202-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-202-003 Manufacturer TEGAL Part Number 37-202-003 Description ELECTRODE, LOWER 8 (TEGAL) Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 39-861-002 42-508-001 93-229-005 RF CABLE 901E 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 43-014-001 39-733-004 Tegal 903e lower electrode 93-123-006 BELT 37-524-001 32-388-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02