Parts For Sale TEGAL 37-198-004 TEGAL 37-198-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-198-004 Manufacturer TEGAL Part Number 37-198-004 Description ELECTRODE,UPPER,ANODE,RAD HOLES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-247-003 SPATULA INTERFACE 37-411-001 41-395-001 32-260-001 46-1014-002 32-356-001 39-735-004 Tegal 903e lower electrode 32-139-002
