Parts For Sale TEGAL 37-198-004 TEGAL 37-198-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-198-004 Manufacturer TEGAL Part Number 37-198-004 Description ELECTRODE,UPPER,ANODE,RAD HOLES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 40-467-001 42-362-001 47-101-002 39-894-001 39-733-004 Tegal 903e lower electrode 41-387-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02