Parts For Sale TEGAL 37-198-004 TEGAL 37-198-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-198-004 Manufacturer TEGAL Part Number 37-198-004 Description ELECTRODE,UPPER,ANODE,RAD HOLES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 99-247-003 SPATULA INTERFACE 31-406-003 WAFER SENSOR ASSY-VCE 40-467-001 42-362-001 47-101-002 39-894-001 40-295-003 FOCUS RING 93-123-006 BELT 41-387-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002
