Parts For Sale TEGAL 37-198-004 TEGAL 37-198-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-198-004 Manufacturer TEGAL Part Number 37-198-004 Description ELECTRODE,UPPER,ANODE,RAD HOLES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 42-1002-001 46-113-001 39-741-026 Tegal 903e lower electrode 33-700-001 99-287-003 SHUTTLE INTERFACE BOARD 47-437-001 46-990-001 40-790-001 FOCUS RING 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 39-665-001