Parts For Sale TEGAL 37-198-004 TEGAL 37-198-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-198-004 Manufacturer TEGAL Part Number 37-198-004 Description ELECTRODE,UPPER,ANODE,RAD HOLES Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 40-481-002 Insulator Ring 37-180-001 93-229-005 RF CABLE 901E 23-193-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 39-741-009 Tegal 903e lower electrode 32-301-001 44-957-001