Parts For Sale TEGAL 37-191-002 TEGAL 37-191-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-191-002 Manufacturer TEGAL Part Number 37-191-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-756-003 37-411-001 42-899-001 41-395-001 51-228-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 46-1014-002 39-140-002 150 mm 150 mm 25 slot Aluminum wafer carrier.