Parts For Sale TEGAL 37-167-002 TEGAL 37-167-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-167-002 Manufacturer TEGAL Part Number 37-167-002 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 40-768-006 Insulator Ring 38-023-001 COOLING RING 37-180-001 44-888-001 42-683-001 39-956-001 42-960-003 40-295-003 FOCUS RING 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 44-957-001 40-304-001 ELECTRODE, INSULATOR LOWER 150 mm 150 mm 25 slot Aluminum wafer carrier.
