Parts For Sale TEGAL 32-547-001 TEGAL 32-547-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-547-001 Manufacturer TEGAL Part Number 32-547-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 47-155-001 40-395-001 RING, FLAT 6 46-787-002 39-563-001 47-639-001 47-080-003 41-271-002 99-249-002 PCB TEGAL END POINT DETECTOR 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode