Parts For Sale TEGAL 32-517-001 TEGAL 32-517-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-517-001 Manufacturer TEGAL Part Number 32-517-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 51-251-001 39-680-003 ELECTRODE, CONEHEAD VENTED 51-092-001 74-124-005 42-326-002 42-960-003 39-741-009 Tegal 903e lower electrode 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 46-556-002 150 mm 150 mm 25 slot Aluminum wafer carrier.