Parts For Sale TEGAL 32-514-002 TEGAL 32-514-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-514-002 Manufacturer TEGAL Part Number 32-514-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 52-058-002 40-481-002 Insulator Ring 47-155-001 46-787-002 39-563-001 47-639-001 47-080-003 41-271-002 93-123-006 BELT 99-249-002 PCB TEGAL END POINT DETECTOR 40-790-001 FOCUS RING 80-202-357 O-Ring