Parts For Sale TEGAL 32-401-001 TEGAL 32-401-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-401-001 Manufacturer TEGAL Part Number 32-401-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 41-113-001 40-768-006 Insulator Ring 99-247-003 SPATULA INTERFACE 80-195-450 42-456-003 40-790-001 FOCUS RING 42-180-001/002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-533-001 37-668-001 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.