Parts For Sale TEGAL 32-353-002 TEGAL 32-353-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-353-002 Manufacturer TEGAL Part Number 32-353-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 58-073-001 42-1007-001 39-680-003 ELECTRODE, CONEHEAD VENTED 39-818-007 31-406-003 WAFER SENSOR ASSY-VCE 40-467-001 39-894-001 46-278-004 40-790-001 FOCUS RING 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.