Parts For Sale TEGAL 32-323-002 TEGAL 32-323-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-323-002 Manufacturer TEGAL Part Number 32-323-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 42-906-001 41-063-003 46-488-002 47-080-003 39-733-004 Tegal 903e lower electrode 39-741-009 Tegal 903e lower electrode 46-1010-001 42-217-001 55-008-001 BELT SPAT 150 mm 150 mm 25 slot Aluminum wafer carrier.