Parts For Sale TEGAL 32-323-002 TEGAL 32-323-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-323-002 Manufacturer TEGAL Part Number 32-323-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-481-002 Insulator Ring 37-411-001 42-899-001 41-395-001 99-287-003 SHUTTLE INTERFACE BOARD 46-1014-002 32-356-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 39-140-002 150 mm 150 mm 25 slot Aluminum wafer carrier.