Parts For Sale TEGAL 32-323-002 TEGAL 32-323-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-323-002 Manufacturer TEGAL Part Number 32-323-002 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-879-001 31-406-003 WAFER SENSOR ASSY-VCE 80-650-053 ACTUATOR 47-583-001 39-761-001 47-695-001 41-362-002 32-415-002 50-056-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 80-200-121 BEARING DOOR T915 TEGAL CORPORATION