Parts For Sale TEGAL 32-287-001 TEGAL 32-287-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-287-001 Manufacturer TEGAL Part Number 32-287-001 Description Status Available Approx. Qty 33 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 33.0 US Other TEGAL Parts 37-411-001 42-899-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 41-395-001 51-228-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 46-1014-002 40-790-001 FOCUS RING 32-356-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 150 mm 150 mm 25 slot Aluminum wafer carrier.