Parts For Sale TEGAL 32-266-004 TEGAL 32-266-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-266-004 Manufacturer TEGAL Part Number 32-266-004 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 41-113-001 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 42-456-003 99-249-002 PCB TEGAL END POINT DETECTOR 42-180-001/002 39-533-001 37-668-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL