Parts For Sale TEGAL 32-266-003 TEGAL 32-266-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-266-003 Manufacturer TEGAL Part Number 32-266-003 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 38-023-001 COOLING RING 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 42-362-001 47-101-002 39-894-001 41-387-001 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.