Parts For Sale TEGAL 32-216-003 TEGAL 32-216-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-216-003 Manufacturer TEGAL Part Number 32-216-003 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 80-650-053 ACTUATOR 40-467-001 42-362-001 47-101-002 39-894-001 39-733-004 Tegal 903e lower electrode 41-387-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002 40-576-003-C Ring Ceramic Focus Castellated 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE