Parts For Sale TEGAL 32-172-001 TEGAL 32-172-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-172-001 Manufacturer TEGAL Part Number 32-172-001 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 40-768-004 Insulator Ring 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 47-155-001 46-787-002 39-563-001 47-639-001 99-287-003 SHUTTLE INTERFACE BOARD 47-080-003 41-271-002 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 150 mm 150 mm 25 slot Aluminum wafer carrier.