Parts For Sale TEGAL 32-171-001 TEGAL 32-171-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-171-001 Manufacturer TEGAL Part Number 32-171-001 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 40-395-002 Ring Ceramic 125C Castellated 47-155-001 40-395-001 RING, FLAT 6 46-787-002 39-563-001 47-639-001 47-080-003 41-271-002