Parts For Sale TEGAL 32-163-001 TEGAL 32-163-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-163-001 Manufacturer TEGAL Part Number 32-163-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 37-180-001 93-229-005 RF CABLE 901E 44-888-001 39-956-001 42-960-003 39-741-009 Tegal 903e lower electrode 32-301-001 44-957-001 37-222-002 Cooling Plate