Parts For Sale TEGAL 32-163-001 TEGAL 32-163-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-163-001 Manufacturer TEGAL Part Number 32-163-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 39-853-005 31-406-003 WAFER SENSOR ASSY-VCE 47-155-001 46-787-002 39-563-001 39-741-026 Tegal 903e lower electrode 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-639-001 47-080-003 41-271-002 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST