Parts For Sale TEGAL 32-163-001 TEGAL 32-163-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-163-001 Manufacturer TEGAL Part Number 32-163-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 52-058-002 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 74-124-005 93-229-005 RF CABLE 901E 42-326-002 42-960-003 93-123-006 BELT 46-556-002