Parts For Sale TEGAL 32-153-001 TEGAL 32-153-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-153-001 Manufacturer TEGAL Part Number 32-153-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 39-861-002 31-406-003 WAFER SENSOR ASSY-VCE 42-508-001 41-351-003 43-014-001 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 37-524-001 32-388-001 39-735-004 Tegal 903e lower electrode 150 mm 150 mm 25 slot Aluminum wafer carrier.