Parts For Sale TEGAL 32-111-001 TEGAL 32-111-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-111-001 Manufacturer TEGAL Part Number 32-111-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 99-247-003 SPATULA INTERFACE 42-1033-001 80-650-053 ACTUATOR 32-242-001 32-165-001 99-249-002 PCB TEGAL END POINT DETECTOR 39-611-001 40-790-001 FOCUS RING 51-265-001 40-576-003-C Ring Ceramic Focus Castellated 42-560-002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%