Parts For Sale TEGAL 32-065-001 TEGAL 32-065-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-065-001 Manufacturer TEGAL Part Number 32-065-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 41-113-001 40-395-002 Ring Ceramic 125C Castellated 31-406-003 WAFER SENSOR ASSY-VCE 38-023-001 COOLING RING 80-195-450 42-456-003 40-260-001 WINDOW, SAPPHIRE 1x2.5 42-180-001/002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-533-001 37-668-001