Parts For Sale TEGAL 32-052-002 TEGAL 32-052-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-052-002 Manufacturer TEGAL Part Number 32-052-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 41-113-001 39-853-005 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 93-123-006 BELT 42-456-003 42-180-001/002 37-222-002 Cooling Plate 39-533-001 37-668-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL