Parts For Sale TEGAL 32-052-002 TEGAL 32-052-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 32-052-002 Manufacturer TEGAL Part Number 32-052-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 38-023-001 COOLING RING 40-140-001 RING, CERAMIC INSULATOR 52-050-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 42-852-001 44-960-001 52-041-001 39-750-001 47-445-001