Parts For Sale TEGAL 31-513-001 TEGAL 31-513-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-513-001 Manufacturer TEGAL Part Number 31-513-001 Description CONN RECEPTACLE ASS,CE 6500 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 38-023-001 COOLING RING 80-195-450 80-1025-01 HEATER 39-733-004 Tegal 903e lower electrode 42-456-003 40-790-001 FOCUS RING 42-180-001/002 80-202-357 O-Ring 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-533-001 37-668-001
