Parts For Sale TEGAL 31-513-001 TEGAL 31-513-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-513-001 Manufacturer TEGAL Part Number 31-513-001 Description CONN RECEPTACLE ASS,CE 6500 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 80-650-053 ACTUATOR 42-508-001 39-756-003 41-351-003 39-741-026 Tegal 903e lower electrode 43-014-001 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 40-304-001 ELECTRODE, INSULATOR LOWER 32-388-001 39-605-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02