Parts For Sale TEGAL 31-513-001 TEGAL 31-513-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-513-001 Manufacturer TEGAL Part Number 31-513-001 Description CONN RECEPTACLE ASS,CE 6500 Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 JP Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 52-058-002 39-756-003 37-180-001 39-741-026 Tegal 903e lower electrode 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-741-010 Tegal 903e lower electrode 39-733-004 Tegal 903e lower electrode 32-301-001 40-790-001 FOCUS RING 39-735-008 ELECTRODE, LOWER ANODIZED 6"
