Parts For Sale TEGAL 31-330-004 TEGAL 31-330-004 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-330-004 Manufacturer TEGAL Part Number 31-330-004 Description SENSOR, PIN, DWN CYL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 40-481-002 Insulator Ring 23-459-001 32-242-001 32-165-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 99-287-003 SHUTTLE INTERFACE BOARD 39-611-001 51-265-001 42-560-002