Parts For Sale TEGAL 31-330-002 TEGAL 31-330-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-330-002 Manufacturer TEGAL Part Number 31-330-002 Description SENSOR, PIN UP CYL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 58-073-001 161-0040K VALVE, INLINE VACUUM 40-467-001 42-362-001 47-101-002 39-894-001 40-295-003 FOCUS RING 52-047-002 40-304-001 ELECTRODE, INSULATOR LOWER 80-202-357 O-Ring
