Parts For Sale TEGAL 31-330-002 TEGAL 31-330-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-330-002 Manufacturer TEGAL Part Number 31-330-002 Description SENSOR, PIN UP CYL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 39-741-004 ELECTRODE, LOWER 6" 40-768-006 Insulator Ring 37-180-001 83-259-001 39-741-026 Tegal 903e lower electrode 39-741-010 Tegal 903e lower electrode 40-295-003 FOCUS RING 80-200-342 BAND CONT,FEM .125PIN .320L,BC 80-200-342 A4T1 PAD ETCHE ... 32-301-001 39-735-008 ELECTRODE, LOWER ANODIZED 6"