Parts For Sale TEGAL 31-330-002 TEGAL 31-330-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-330-002 Manufacturer TEGAL Part Number 31-330-002 Description SENSOR, PIN UP CYL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 46-879-001 46-1006-001 80-650-053 ACTUATOR 39-756-003 40-395-001 RING, FLAT 6 47-583-001 47-695-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-260-001 WINDOW, SAPPHIRE 1x2.5 50-056-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%