Parts For Sale TEGAL 31-330-002 TEGAL 31-330-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-330-002 Manufacturer TEGAL Part Number 31-330-002 Description SENSOR, PIN UP CYL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 40-768-006 Insulator Ring 51-251-001 51-092-001 74-124-005 80-650-053 ACTUATOR 29-213-001 Kit O-Ring 42-960-003 80-202-357 O-Ring 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 46-556-002