Parts For Sale TEGAL 31-330-002 TEGAL 31-330-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 31-330-002 Manufacturer TEGAL Part Number 31-330-002 Description SENSOR, PIN UP CYL Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 31-406-003 WAFER SENSOR ASSY-VCE 47-155-001 93-229-005 RF CABLE 901E 46-787-002 39-563-001 80-197-049 GASKET, BNT BLWS-V KEL-F, 1/2 ID 40-140-001 RING, CERAMIC INSULATOR 47-080-003 99-249-002 PCB TEGAL END POINT DETECTOR 15394-2 Spacer 39-735-004 Tegal 903e lower electrode