Parts For Sale TEGAL 29-478-001 TEGAL 29-478-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 29-478-001 Manufacturer TEGAL Part Number 29-478-001 Description KIT, FLD-CYL RP EICTD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 161-0040K VALVE, INLINE VACUUM 80-650-053 ACTUATOR 40-467-001 42-362-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-101-002 39-894-001 41-387-001 52-047-002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.