Parts For Sale TEGAL 29-478-001 TEGAL 29-478-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 29-478-001 Manufacturer TEGAL Part Number 29-478-001 Description KIT, FLD-CYL RP EICTD Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 37-221-002 UPPER ELECT ANOD, NON ANODIZED 37-180-001 93-229-005 RF CABLE 901E 23-193-003 93-123-006 BELT 32-301-001 44-957-001 80-202-357 O-Ring 39-735-008 ELECTRODE, LOWER ANODIZED 6" 39-735-004 Tegal 903e lower electrode 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02