Parts For Sale TEGAL 29-146-001 TEGAL 29-146-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 29-146-001 Manufacturer TEGAL Part Number 29-146-001 Description KIT, FLD, PM- O-RING 90XE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 41-113-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 39-680-003 ELECTRODE, CONEHEAD VENTED 40-481-002 Insulator Ring 80-195-450 40-295-003 FOCUS RING 42-456-003 42-180-001/002 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-533-001 37-668-001