Parts For Sale TEGAL 29-146-001 TEGAL 29-146-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 29-146-001 Manufacturer TEGAL Part Number 29-146-001 Description KIT, FLD, PM- O-RING 90XE Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other TEGAL Parts 58-073-001 161-0040K VALVE, INLINE VACUUM 99-247-003 SPATULA INTERFACE 40-467-001 40-140-001 RING, CERAMIC INSULATOR 42-362-001 47-101-002 39-894-001 39-733-004 Tegal 903e lower electrode 52-047-002 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E
