Parts For Sale TEGAL 23-197-005 TEGAL 23-197-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-197-005 Manufacturer TEGAL Part Number 23-197-005 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 40-768-004 Insulator Ring 41-113-001 52-058-002 80-195-450 42-456-003 42-180-001/002 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 39-533-001 37-668-001