Parts For Sale TEGAL 23-197-005 TEGAL 23-197-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-197-005 Manufacturer TEGAL Part Number 23-197-005 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 47-158-002 39-861-002 38-023-001 COOLING RING 42-508-001 41-351-003 39-733-004 Tegal 903e lower electrode 37-524-001 40-304-001 ELECTRODE, INSULATOR LOWER 32-388-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E