Parts For Sale TEGAL 23-197-002 TEGAL 23-197-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-197-002 Manufacturer TEGAL Part Number 23-197-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 41-113-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 42-456-003 42-180-001/002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-533-001 37-668-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
