Parts For Sale TEGAL 23-197-002 TEGAL 23-197-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-197-002 Manufacturer TEGAL Part Number 23-197-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 46-437-002 41-135-001 99-247-003 SPATULA INTERFACE 31-406-003 WAFER SENSOR ASSY-VCE 47-526-001 46-735-002 51-191-001 47-672-001 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 39-741-026 Tegal 903e lower electrode 80-202-357 O-Ring