Parts For Sale TEGAL 23-182-001 TEGAL 23-182-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 23-182-001 Manufacturer TEGAL Part Number 23-182-001 Description Status Available Approx. Qty 10 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 10.0 US Other TEGAL Parts 58-073-001 40-467-001 42-362-001 47-101-002 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 93-123-006 BELT 52-047-002 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 150 mm 150 mm 25 slot Aluminum wafer carrier.