Parts For Sale TEGAL 15394-3 TEGAL 15394-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 15394-3 Manufacturer TEGAL Part Number 15394-3 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 74-124-005 42-326-002 42-960-003 40-260-001 WINDOW, SAPPHIRE 1x2.5 39-735-004 Tegal 903e lower electrode 46-556-002