Parts For Sale TEGAL 15394-3 TEGAL 15394-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 15394-3 Manufacturer TEGAL Part Number 15394-3 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 52-050-001 42-852-001 44-960-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 52-041-001 50-056-001 39-750-001 80-200-121 BEARING DOOR T915 TEGAL CORPORATION 47-445-001