Parts For Sale TEGAL 15394-3 TEGAL 15394-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 15394-3 Manufacturer TEGAL Part Number 15394-3 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 41-113-001 99-247-003 SPATULA INTERFACE 40-481-002 Insulator Ring 40-395-001 RING, FLAT 6 80-195-450 39-741-026 Tegal 903e lower electrode 42-456-003 42-180-001/002 40-576-003-C Ring Ceramic Focus Castellated 39-533-001 37-668-001
