Parts For Sale TEGAL 15394-1 TEGAL 15394-1 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 15394-1 Manufacturer TEGAL Part Number 15394-1 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 46-437-002 52-058-002 41-135-001 47-526-001 93-229-005 RF CABLE 901E 46-735-002 51-191-001 47-672-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001