Parts For Sale TEGAL 10528 TEGAL 10528 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 10528 Manufacturer TEGAL Part Number 10528 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 39-680-003 ELECTRODE, CONEHEAD VENTED 47-155-001 46-787-002 39-563-001 39-761-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 41-271-002 39-733-004 Tegal 903e lower electrode 39-741-009 Tegal 903e lower electrode 15394-2 Spacer 150 mm 150 mm 25 slot Aluminum wafer carrier.
