Parts For Sale TEGAL 10528 TEGAL 10528 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 10528 Manufacturer TEGAL Part Number 10528 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 46-1006-001 37-411-001 41-395-001 51-228-001 32-260-001 40-576-003-C Ring Ceramic Focus Castellated 80-202-357 O-Ring 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 32-356-001 32-139-002
