Parts For Sale TEGAL 10528 TEGAL 10528 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 10528 Manufacturer TEGAL Part Number 10528 Description Spacer Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 41-113-001 80-195-450 40-140-001 RING, CERAMIC INSULATOR 42-456-003 99-249-002 PCB TEGAL END POINT DETECTOR 42-180-001/002 39-533-001 37-668-001 150 mm 150 mm 25 slot Aluminum wafer carrier.
