Parts For Sale SILICON VALLEY GROUP (SVG) 6480-0067 SVG 6480-0067 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 6480-0067 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 6480-0067 Description PHOS, CAU PCB Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other SILICON VALLEY GROUP Parts 205-453 WASHER SPRING CURVED 3/8 X 7/8 MYP9400002 PCB SBC TUBE COMP. MYP9400002 SVG THERMCO SYSTEM 80122B PCB SVG 80122B TRACK INTERFACE 80039D 80039D PCB SVG 80039D INDEXER INTERFACE 99-47944-03 ASSY,CASS. PLATFORM 150-200 MM SVG Part. No. 99-479 ... 161480-001 RELAY INTERLOCK BOARD 864-0140-001 ASML/SVG PN: 864-0140-001 Vacuum Chuck? 20990-01 CATCH CUP DEVELOPER 47825-01 REV. A SVG Part. No. ... 99-80137-00 PCB, Handler Interconnect , SVG P/N 99-80137-00 99-38892-01 DEVELOPER SPINDLE METER CONTROLLER 99-37934-01 CENTERING ARC I