Parts For Sale SILICON VALLEY GROUP (SVG) 602668-04 SVG 602668-04 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 602668-04 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 602668-04 Description CAROUSEL ASSY, DRIVE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 US Other SILICON VALLEY GROUP Parts 99-16310-01 HARN 6 INDEXER, TFE 206-053 PLUG,10-32WHT NY206-053 972N51 SENSOROPB 972N51 112/041 112/041 MOTOR STEPPER 5 VDC 80122B-02 PCB, Track Interface , SVG P/N 80122B-02 202-161 O-RING 99-80315 SVG PCB Set Ex. Flow Cont. 99-80315, Vac Sens 99-08170 214-024 SPACER 851-9075-010 SVG Silicon Valley Group 851-9075-010 Wafer Handling Rob ... 99-19961-01 SVG Silicon Valley Group 99-19961-01 Servomotor Linear G ... 49022-01 SHAFT, SUPPORT, TOP SVG Part. No. 49022-01 00-46236-02 CHUCK, DEVELOP 150mm (SVG90)