Parts For Sale SILICON VALLEY GROUP (SVG) 600066-02 SVG 600066-02 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 600066-02 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 600066-02 Description PCB GAS INTERFACE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other SILICON VALLEY GROUP Parts 06-49613-01 BALL LEAD SCREW SPINDLE DRIVE SVG Part. No. 06-49613-01 690-8045-006 PCB CARRIAGE DRIVE LOGIC B 203-013 CLEVIS ASSEMBLY SPIN STA 16188-01 PIN CHILL PLATE 16188-01 A3S4 SVG-88 COATER 38465-01 SVG Silicon Valley Group 38465-01 Spin Chuck DEV 90SER 2 ... 41264-01 PULLEY ARM 080 PITCH 50 TOOTH SVG Part. No. 41264-01 99-80367-01 SVG Silicon Valley Group APS Series PMAC PMAC2 Buffer Mo ... 99-41467-01 Ass'y Serial Arm 859-1510-002 ASML/SVG 859-1510-002 201-001 BRG 1/8" IDX5/16" OD SST 201-007 BALL BUSHING SEAL 3/8" 202-023 O-RING
