Parts For Sale SILICON VALLEY GROUP (SVG) 600066-02 SVG 600066-02 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 600066-02 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 600066-02 Description PCB GAS INTERFACE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 – Other SILICON VALLEY GROUP Parts 16278-01 Centering Arc, Fixed SVG P/N 16278-01 99-66564-01 Assy, Exhaust Flow Control SVG-06734-08 Chuck Developer Teflon 4 1/2" for 6" 220/002 220/002 PULLEY 99-80166-01 PCB Relay Dev Station Control 112-084 MOTOR, SPINDLE SPIN STA, HI ACC SVG Part. No. 112-084 217-099 FILTER, INLINE, GAS,.003UM SVG Part. No. 217-099 19307775-29 PER FLPY DISK 90S 168309-002 MANIFOLD SVG OUTER MANIFOLD 1-4B 66412-01 66412-01 HOLDER ARC 1 SER/RDM 150MM 90SE DEV