Parts For Sale SILICON VALLEY GROUP (SVG) 27-66286-01 SVG 27-66286-01 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 27-66286-01 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 27-66286-01 Description Motor SVG Spindle Z-Axis Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other SILICON VALLEY GROUP Parts 06-49613-01 BALL LEAD SCREW SPINDLE DRIVE SVG Part. No. 06-49613-01 206-053 PLUG,10-32WHT NY206-053 116-172 PIN CONTACT 18-26GA 165X.I 99-80315 SVG PCB Set Ex. Flow Cont. 99-80315, Vac Sens 99-08170 214-024 SPACER 851-9075-010 SVG Silicon Valley Group 851-9075-010 Wafer Handling Rob ... 112-130 MOTOR, 24VDC, 15:1 GEARHEAD W/ENCODER 49022-01 SHAFT, SUPPORT, TOP SVG Part. No. 49022-01 114-059 VALVE 12 3-WAY 24VDC 01-48132-010 ADAPTOR FLAT PANEL 90-80317-01 PCB MOTHERBOARD 90S SVG Part. No. 90-80317-01 99-37934-01 CENTERING ARC I