Parts For Sale SILICON VALLEY GROUP (SVG) 163246-002 SVG 163246-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 163246-002 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 163246-002 Description GAS LINE Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other SILICON VALLEY GROUP Parts 80039D 80039D PCB SVG 80039D INDEXER INTERFACE 27-66286-01 Motor SVG Spindle Z-Axis 206-053 PLUG,10-32WHT NY206-053 16217-01 BAKE PLATE LIFT PIN 116-172 PIN CONTACT 18-26GA 165X.I 851-9075-010 SVG Silicon Valley Group 851-9075-010 Wafer Handling Rob ... 19307775-29 PER FLPY DISK 90S 201-007 BALL BUSHING SEAL 3/8" 49022-01 SHAFT, SUPPORT, TOP SVG Part. No. 49022-01 114-059 VALVE 12 3-WAY 24VDC 201-017 BEARING,1/4 X 5/8 01-48132-010 ADAPTOR FLAT PANEL