Parts For Sale SILICON VALLEY GROUP (SVG) 163246-002 SVG 163246-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 163246-002 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 163246-002 Description GAS LINE Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other SILICON VALLEY GROUP Parts 879-8379-001 PCB 99-66564-01 Assy, Exhaust Flow Control 99-48555-06 Assembly , Main E-Chain 99-40350-01 Alloy Products 99-40350-01 Pressure Vessel HMDS CANISTER ... SVG-06734-08 Chuck Developer Teflon 4 1/2" for 6" 99-80166-01 PCB Relay Dev Station Control 8000-1319 ASSY, KF40 SWITCH 01-23076-01 SHAFT,ARM DRIVE 99-80158-01 Ass'y T EBR Bottom PC Board 111-033 BREAKER-CIRCUIT 600400-01 PCB, ACE INTERFACE