Parts For Sale SILICON VALLEY GROUP (SVG) 163246-002 SVG 163246-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SVG 163246-002 Manufacturer SILICON VALLEY GROUP (SVG) Part Number 163246-002 Description GAS LINE Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 3.0 US Other SILICON VALLEY GROUP Parts 99-80266-01 SVG 90S Fluid Temperature Station CPU Board 99-80266-01 ... 99-49624-01 ASSY, SPINDLE DRIVE 90SE SVG Part. No. 99-49624-01 206-740 QUICK DISCO PNL MT 1/4ID TUBE 206-740 99-80146-01 PCB, VACUUM DELAY SVG-06734-08 Chuck Developer Teflon 4 1/2" for 6" 024-006915-1 Filter, ZXI-F TEL / Varian P/N 024-006915-1 203-011 CYL AIR 3/4 BORE X 1IN STR 99-42795-01 Alloy Products 99-42795-01 Pressure Vessel CANISTER #2 D ... 201-017 BEARING,1/4 X 5/8 174722-001 POWER SUPPLY +/-15DC