Parts For Sale SPEEDFAM 966169 SPEEDFAM 966169 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SPEEDFAM 966169 Manufacturer SPEEDFAM Part Number 966169 Description SPRING,COMP,48ODX.080WX2L Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 1.0 US Other SPEEDFAM Parts IPEC 472 SPEEDFAM CMP-2