Parts For Sale SEMITOOL 66770 SEMITOOL 66770 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details SEMITOOL 66770 Manufacturer SEMITOOL Part Number 66770 Description CHAMBER ARC Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 2.0 US Other SEMITOOL Parts 610T0302-501 Semitool 610T0302-501 Transfer Robot 500R0409-01 Semitool 500R0409-01 50 Wafer Carrierless Rotor Assembly ... 241R0009-03 AGGRESSIVE THREAD MTR SEAL 16753-513 BRD, MTR, INRFCE 21-EP1000 Bowl, Electropolish Only 73000-24 SENSOR, FUME 14863-509 BRD ASSY STD MTR INTERFACE BRSLS 341C0001-01 NOZZLE SPRAY 16753-509 PCB Board, Motor, Semitool 310C0093-03 ACTUATOR ASSEMBLY 3/8 () 61340-03 MONITOR VIBRATION 24VDC 610T1087-01 Module Dual Arm Robot Fully refurbished and tested!