Parts For Sale MKS INSTRUMENTS FI80131 MKS INSTRUMENTS FI80131 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MKS INSTRUMENTS FI80131 Manufacturer MKS INSTRUMENTS Part Number FI80131 Description Remote Plasma Source Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Used 1.0 – Other MKS INSTRUMENTS Parts 1179A12CR1BV MASS FLOW CONTROLLER