Parts For Sale MATTSON S1D40073 MATTSON S1D40073 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON S1D40073 Manufacturer MATTSON Part Number S1D40073 Description Quartz Gas Dist Plate T Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Unknown 3.0 US Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 58500053 300mm wafer pins 17mm lg. sharp 10° 301-08506-00 PLT COIL SPRT INDEPENDENT CTL 544-00014-00 PLATE GRID RF A 141-00065-00 SENSOR SPRING PIN BALL 913-10029-00 O-RING, 1.296 ID X .139CS, VITON Rev : 02 Unit: PAK 58500047 Quartz Pin 262-00002-00 ment Arm Spindle Mattson 914-14011-00 57600014 plate gasdistribution-, rotation back 303-02685-00