Parts For Sale MATTSON 552-21528-00 MATTSON 552-21528-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 552-21528-00 Manufacturer MATTSON Part Number 552-21528-00 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 IL Other MATTSON Parts 913-12004-00 SEAL ROD T 9 16 INCH 041-00009-00 915-41001-00 THUMBSCREWS (10-32X1SS) 910-12001-00 141-00065-00 SENSOR SPRING PIN BALL 263-06185-00 COIL ASSY, SILVER PLATED 299-20000-00 Mattson, ASSY, PCB ICP PLASMA SENSE, A2, p/n 299-20000-00 58500029 PLATE LINER PLATE TOP SPACER 045-23049-00 501-23880-00 303-05085-00 912-21001-00 PIN 2 ROBOT ALIGNMENT