Parts For Sale MATTSON 552-21528-00 MATTSON 552-21528-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 552-21528-00 Manufacturer MATTSON Part Number 552-21528-00 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 IL Other MATTSON Parts 58600046 ROTATION TRAY 12, 3mm DOUBLE PACKAGE INSTALLATION POSSIB ... 58500053 300mm wafer pins 17mm lg. sharp 10° 520-04612-00 062-00003-00 PIN, HEATER Rev : 01 Unit: EA 165-90000-00 PCA, DIGITAL I/O BOARD M 456-08133-00 041-00048-00 SHUTTLE ROTATE CLAMP 262-00002-00 ment Arm Spindle Mattson 263-20104-00 ASY,BND END EFF., TRIPLE, 300MM 914-14011-00 182-64000-00 Cable Assy #301 303-02685-00