Parts For Sale MATTSON 552-21528-00 MATTSON 552-21528-00 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details MATTSON 552-21528-00 Manufacturer MATTSON Part Number 552-21528-00 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 IL Other MATTSON Parts 263-15570-01 302-15864-00 SPRING,SNSR CASSETTE 635-02946-00 553-16430-00 RFS 3011 / 553-16430-00 304-08775-00 263-06185-00 COIL ASSY, SILVER PLATED 57600002 GAS DISTRIBUTOR TYPE T INSTALLATION POSSIBLE ON: MATTSON ... 263-00529-00 CBL ASY, 2, COMPUTER TO ROBOT / ASPEN II 910-10027-00 255-15302-00 Mattson 255-15302-00 Wafer Mapper Controller PCB SVPC-2 ... 255-00568-00 ASY-PCB-MOBL-FLX-PBTINTERFOE 400-05478-00 CYL, PNEU, 40MM B X 125MM STOKE